3/13/2010	9:50:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	9:50:22 AM	Recipe started at 9:50 AM
3/13/2010	9:50:22 AM	H2 valve closed
3/13/2010	9:50:22 AM	BCl3 valve closed
3/13/2010	9:50:22 AM	PH3 valve closed
3/13/2010	9:50:22 AM	SiCl4 pre valve closed
3/13/2010	9:50:22 AM	SiCl4 post valve closed
3/13/2010	9:50:22 AM	Main Vac valve closed
3/13/2010	9:50:22 AM	Bypass valve closed
3/13/2010	9:50:22 AM	Bubbler valve closed
3/13/2010	9:50:22 AM	Helium valve opened
3/13/2010	9:50:22 AM	Helium MFC set to  500.000000
3/13/2010	9:50:22 AM	H2 MFC set to  0.000000
3/13/2010	9:50:22 AM	BCl3 MFC set to  0.000000
3/13/2010	9:50:22 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:50:22 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:50:22 AM	Tube furnace set to 0
3/13/2010	9:51:43 AM	Helium valve closed
3/13/2010	9:51:43 AM	H2 valve closed
3/13/2010	9:51:43 AM	BCl3 valve closed
3/13/2010	9:51:43 AM	PH3 valve closed
3/13/2010	9:51:43 AM	SiCl4 pre valve closed
3/13/2010	9:51:43 AM	SiCl4 post valve closed
3/13/2010	9:51:43 AM	Main Vac valve closed
3/13/2010	9:51:43 AM	Bypass valve closed
3/13/2010	9:51:43 AM	Bubbler valve closed
3/13/2010	9:51:43 AM	Helium MFC set to  0.000000
3/13/2010	9:51:43 AM	H2 MFC set to  0.000000
3/13/2010	9:51:43 AM	BCl3 MFC set to  0.000000
3/13/2010	9:51:43 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:51:43 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:51:43 AM	Tube furnace set to 0
3/13/2010	9:51:44 AM	Run finished at 9:51 AM
3/13/2010	9:51:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	9:54:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/13/2010	9:54:47 AM	Recipe started at 9:54 AM
3/13/2010	9:54:47 AM	H2 valve closed
3/13/2010	9:54:47 AM	BCl3 valve closed
3/13/2010	9:54:47 AM	PH3 valve closed
3/13/2010	9:54:47 AM	SiCl4 pre valve closed
3/13/2010	9:54:47 AM	SiCl4 post valve closed
3/13/2010	9:54:47 AM	Main Vac valve closed
3/13/2010	9:54:47 AM	Bypass valve closed
3/13/2010	9:54:47 AM	Bubbler valve closed
3/13/2010	9:54:47 AM	Helium valve opened
3/13/2010	9:54:47 AM	Helium MFC set to  500.000000
3/13/2010	9:54:47 AM	H2 MFC set to  0.000000
3/13/2010	9:54:47 AM	BCl3 MFC set to  0.000000
3/13/2010	9:54:47 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:54:47 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:54:47 AM	Tube furnace set to 0
3/13/2010	9:54:50 AM	Helium valve closed
3/13/2010	9:54:50 AM	H2 valve closed
3/13/2010	9:54:50 AM	BCl3 valve closed
3/13/2010	9:54:50 AM	PH3 valve closed
3/13/2010	9:54:50 AM	SiCl4 pre valve closed
3/13/2010	9:54:50 AM	SiCl4 post valve closed
3/13/2010	9:54:50 AM	Main Vac valve closed
3/13/2010	9:54:50 AM	Bypass valve closed
3/13/2010	9:54:50 AM	Bubbler valve closed
3/13/2010	9:54:50 AM	Helium MFC set to  0.000000
3/13/2010	9:54:50 AM	H2 MFC set to  0.000000
3/13/2010	9:54:50 AM	BCl3 MFC set to  0.000000
3/13/2010	9:54:50 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:54:50 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:54:50 AM	Tube furnace set to 0
3/13/2010	9:55:05 AM	Helium valve closed
3/13/2010	9:55:05 AM	H2 valve closed
3/13/2010	9:55:05 AM	BCl3 valve closed
3/13/2010	9:55:05 AM	PH3 valve closed
3/13/2010	9:55:05 AM	SiCl4 pre valve closed
3/13/2010	9:55:05 AM	SiCl4 post valve closed
3/13/2010	9:55:05 AM	Main Vac valve closed
3/13/2010	9:55:05 AM	Bubbler valve closed
3/13/2010	9:55:05 AM	Bypass valve opened
3/13/2010	9:55:05 AM	Helium MFC set to  0.000000
3/13/2010	9:55:05 AM	H2 MFC set to  0.000000
3/13/2010	9:55:05 AM	BCl3 MFC set to  0.000000
3/13/2010	9:55:05 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:55:05 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:55:05 AM	Tube furnace set to 0
3/13/2010	9:55:05 AM	Helium valve closed
3/13/2010	9:55:05 AM	H2 valve closed
3/13/2010	9:55:05 AM	BCl3 valve closed
3/13/2010	9:55:05 AM	PH3 valve closed
3/13/2010	9:55:05 AM	SiCl4 pre valve closed
3/13/2010	9:55:05 AM	SiCl4 post valve closed
3/13/2010	9:55:05 AM	Bubbler valve closed
3/13/2010	9:55:05 AM	Main Vac valve opened
3/13/2010	9:55:05 AM	Bypass valve opened
3/13/2010	9:55:05 AM	Helium MFC set to  0.000000
3/13/2010	9:55:05 AM	H2 MFC set to  0.000000
3/13/2010	9:55:05 AM	BCl3 MFC set to  0.000000
3/13/2010	9:55:05 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:55:05 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:55:05 AM	Tube furnace set to 0
3/13/2010	9:55:41 AM	Run aborted at 9:55 AM
3/13/2010	9:55:41 AM	Helium valve closed
3/13/2010	9:55:41 AM	H2 valve closed
3/13/2010	9:55:41 AM	BCl3 valve closed
3/13/2010	9:55:41 AM	PH3 valve closed
3/13/2010	9:55:41 AM	SiCl4 pre valve closed
3/13/2010	9:55:41 AM	SiCl4 post valve closed
3/13/2010	9:55:41 AM	Bypass valve closed
3/13/2010	9:55:41 AM	Main Vac valve closed
3/13/2010	9:55:41 AM	Bubbler valve closed
3/13/2010	9:55:41 AM	Helium MFC set to  0.000000
3/13/2010	9:55:41 AM	H2 MFC set to  0.000000
3/13/2010	9:55:42 AM	BCl3 MFC set to  0.000000
3/13/2010	9:55:42 AM	SiCl4 MFC set to  0.000000
3/13/2010	9:55:42 AM	Tube furnace set to 0
3/13/2010	9:55:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/13/2010	9:55:44 AM	Bypass valve closed
3/13/2010	9:55:49 AM	Bypass valve opened
3/13/2010	9:55:52 AM	Main Vac valve closed
3/13/2010	9:55:59 AM	Main Vac valve opened
3/13/2010	9:56:19 AM	Helium MFC set to  100.000000
3/13/2010	9:56:19 AM	Helium valve opened
3/13/2010	10:01:55 AM	Helium MFC set to  0.000000
3/13/2010	10:01:56 AM	Helium valve closed
3/13/2010	10:02:58 AM	Helium MFC set to  100.000000
3/13/2010	10:02:58 AM	Helium valve opened
3/13/2010	10:05:43 AM	Helium MFC set to  0.000000
3/13/2010	10:05:43 AM	Helium valve closed
3/13/2010	10:06:21 AM	Main Vac valve closed
3/13/2010	10:06:24 AM	Bypass valve closed
3/13/2010	10:06:30 AM	Bypass valve opened
3/13/2010	10:06:32 AM	Main Vac valve opened
3/13/2010	10:07:06 AM	Recipe started at 10:07 AM
3/13/2010	10:07:06 AM	Helium valve closed
3/13/2010	10:07:06 AM	BCl3 valve closed
3/13/2010	10:07:06 AM	PH3 valve closed
3/13/2010	10:07:06 AM	SiCl4 pre valve closed
3/13/2010	10:07:06 AM	SiCl4 post valve closed
3/13/2010	10:07:06 AM	Main Vac valve closed
3/13/2010	10:07:06 AM	Bypass valve closed
3/13/2010	10:07:06 AM	Bubbler valve closed
3/13/2010	10:07:06 AM	H2 valve opened
3/13/2010	10:07:06 AM	Helium MFC set to  0.000000
3/13/2010	10:07:06 AM	H2 MFC set to  500.000000
3/13/2010	10:07:06 AM	BCl3 MFC set to  0.000000
3/13/2010	10:07:06 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:07:06 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:07:06 AM	Tube furnace set to 0
3/13/2010	10:08:23 AM	Helium valve closed
3/13/2010	10:08:23 AM	BCl3 valve closed
3/13/2010	10:08:23 AM	PH3 valve closed
3/13/2010	10:08:23 AM	SiCl4 pre valve closed
3/13/2010	10:08:23 AM	SiCl4 post valve closed
3/13/2010	10:08:23 AM	Main Vac valve closed
3/13/2010	10:08:23 AM	Bypass valve closed
3/13/2010	10:08:23 AM	H2 valve opened
3/13/2010	10:08:23 AM	Bubbler valve opened
3/13/2010	10:08:23 AM	Helium MFC set to  0.000000
3/13/2010	10:08:23 AM	H2 MFC set to  500.000000
3/13/2010	10:08:23 AM	BCl3 MFC set to  0.000000
3/13/2010	10:08:23 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:08:23 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:08:23 AM	Tube furnace set to 0
3/13/2010	10:23:23 AM	Helium valve closed
3/13/2010	10:23:23 AM	BCl3 valve closed
3/13/2010	10:23:23 AM	PH3 valve closed
3/13/2010	10:23:23 AM	SiCl4 pre valve closed
3/13/2010	10:23:23 AM	SiCl4 post valve closed
3/13/2010	10:23:23 AM	Main Vac valve closed
3/13/2010	10:23:23 AM	Bypass valve closed
3/13/2010	10:23:23 AM	H2 valve opened
3/13/2010	10:23:23 AM	Bubbler valve opened
3/13/2010	10:23:23 AM	Helium MFC set to  0.000000
3/13/2010	10:23:23 AM	H2 MFC set to  500.000000
3/13/2010	10:23:23 AM	BCl3 MFC set to  0.000000
3/13/2010	10:23:23 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:23:23 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:23:23 AM	Tube furnace set to 0
3/13/2010	10:28:23 AM	H2 valve closed
3/13/2010	10:28:23 AM	BCl3 valve closed
3/13/2010	10:28:23 AM	PH3 valve closed
3/13/2010	10:28:23 AM	SiCl4 pre valve closed
3/13/2010	10:28:23 AM	SiCl4 post valve closed
3/13/2010	10:28:23 AM	Main Vac valve closed
3/13/2010	10:28:23 AM	Bypass valve closed
3/13/2010	10:28:23 AM	Helium valve opened
3/13/2010	10:28:23 AM	Bubbler valve opened
3/13/2010	10:28:23 AM	Helium MFC set to  500.000000
3/13/2010	10:28:23 AM	H2 MFC set to  0.000000
3/13/2010	10:28:23 AM	BCl3 MFC set to  0.000000
3/13/2010	10:28:23 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:28:23 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:28:23 AM	Tube furnace set to 0
3/13/2010	10:33:23 AM	Helium valve closed
3/13/2010	10:33:23 AM	H2 valve closed
3/13/2010	10:33:23 AM	BCl3 valve closed
3/13/2010	10:33:23 AM	PH3 valve closed
3/13/2010	10:33:23 AM	SiCl4 pre valve closed
3/13/2010	10:33:23 AM	SiCl4 post valve closed
3/13/2010	10:33:23 AM	Main Vac valve closed
3/13/2010	10:33:23 AM	Bypass valve closed
3/13/2010	10:33:23 AM	Bubbler valve closed
3/13/2010	10:33:23 AM	Helium MFC set to  0.000000
3/13/2010	10:33:23 AM	H2 MFC set to  0.000000
3/13/2010	10:33:23 AM	BCl3 MFC set to  0.000000
3/13/2010	10:33:23 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:33:23 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:33:23 AM	Tube furnace set to 0
3/13/2010	10:33:24 AM	Run finished at 10:33 AM
3/13/2010	10:39:08 AM	Helium MFC set to  200.000000
3/13/2010	10:39:09 AM	Helium valve opened
3/13/2010	10:39:17 AM	Bubbler valve opened
3/13/2010	10:47:46 AM	Bubbler valve closed
3/13/2010	10:47:49 AM	Helium MFC set to  0.000000
3/13/2010	10:47:49 AM	Helium valve closed
3/13/2010	10:54:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	10:55:00 AM	Recipe started at 10:55 AM
3/13/2010	10:55:00 AM	Helium valve closed
3/13/2010	10:55:00 AM	H2 valve closed
3/13/2010	10:55:00 AM	BCl3 valve closed
3/13/2010	10:55:00 AM	PH3 valve closed
3/13/2010	10:55:00 AM	SiCl4 pre valve closed
3/13/2010	10:55:00 AM	SiCl4 post valve closed
3/13/2010	10:55:00 AM	Main Vac valve closed
3/13/2010	10:55:00 AM	Bubbler valve closed
3/13/2010	10:55:00 AM	Bypass valve opened
3/13/2010	10:55:00 AM	Helium MFC set to  0.000000
3/13/2010	10:55:00 AM	H2 MFC set to  0.000000
3/13/2010	10:55:00 AM	BCl3 MFC set to  0.000000
3/13/2010	10:55:00 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:55:00 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:55:00 AM	Tube furnace set to 0
3/13/2010	10:55:29 AM	Helium valve closed
3/13/2010	10:55:29 AM	H2 valve closed
3/13/2010	10:55:29 AM	BCl3 valve closed
3/13/2010	10:55:29 AM	PH3 valve closed
3/13/2010	10:55:29 AM	SiCl4 pre valve closed
3/13/2010	10:55:29 AM	SiCl4 post valve closed
3/13/2010	10:55:29 AM	Bubbler valve closed
3/13/2010	10:55:29 AM	Main Vac valve opened
3/13/2010	10:55:29 AM	Bypass valve opened
3/13/2010	10:55:29 AM	Helium MFC set to  0.000000
3/13/2010	10:55:29 AM	H2 MFC set to  0.000000
3/13/2010	10:55:29 AM	BCl3 MFC set to  0.000000
3/13/2010	10:55:29 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:55:29 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:55:29 AM	Tube furnace set to 0
3/13/2010	10:55:30 AM	Run finished at 10:55 AM
3/13/2010	10:55:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	10:56:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	10:56:30 AM	Recipe started at 10:56 AM
3/13/2010	10:56:30 AM	H2 valve closed
3/13/2010	10:56:30 AM	BCl3 valve closed
3/13/2010	10:56:30 AM	PH3 valve closed
3/13/2010	10:56:30 AM	SiCl4 pre valve closed
3/13/2010	10:56:30 AM	SiCl4 post valve closed
3/13/2010	10:56:30 AM	Main Vac valve closed
3/13/2010	10:56:30 AM	Bypass valve closed
3/13/2010	10:56:30 AM	Bubbler valve closed
3/13/2010	10:56:30 AM	Helium valve opened
3/13/2010	10:56:30 AM	Helium MFC set to  500.000000
3/13/2010	10:56:30 AM	H2 MFC set to  0.000000
3/13/2010	10:56:30 AM	BCl3 MFC set to  0.000000
3/13/2010	10:56:30 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:56:30 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:56:30 AM	Tube furnace set to 0
3/13/2010	10:57:48 AM	Helium valve closed
3/13/2010	10:57:48 AM	H2 valve closed
3/13/2010	10:57:48 AM	BCl3 valve closed
3/13/2010	10:57:48 AM	PH3 valve closed
3/13/2010	10:57:48 AM	SiCl4 pre valve closed
3/13/2010	10:57:48 AM	SiCl4 post valve closed
3/13/2010	10:57:48 AM	Main Vac valve closed
3/13/2010	10:57:48 AM	Bypass valve closed
3/13/2010	10:57:48 AM	Bubbler valve closed
3/13/2010	10:57:48 AM	Helium MFC set to  0.000000
3/13/2010	10:57:48 AM	H2 MFC set to  0.000000
3/13/2010	10:57:48 AM	BCl3 MFC set to  0.000000
3/13/2010	10:57:48 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:57:48 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:57:48 AM	Tube furnace set to 0
3/13/2010	10:57:48 AM	Run finished at 10:57 AM
3/13/2010	10:57:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	10:57:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	10:57:51 AM	Recipe started at 10:57 AM
3/13/2010	10:57:51 AM	Helium valve closed
3/13/2010	10:57:51 AM	H2 valve closed
3/13/2010	10:57:51 AM	BCl3 valve closed
3/13/2010	10:57:51 AM	PH3 valve closed
3/13/2010	10:57:51 AM	SiCl4 pre valve closed
3/13/2010	10:57:51 AM	SiCl4 post valve closed
3/13/2010	10:57:51 AM	Main Vac valve closed
3/13/2010	10:57:51 AM	Bubbler valve closed
3/13/2010	10:57:51 AM	Bypass valve opened
3/13/2010	10:57:51 AM	Helium MFC set to  0.000000
3/13/2010	10:57:51 AM	H2 MFC set to  0.000000
3/13/2010	10:57:51 AM	BCl3 MFC set to  0.000000
3/13/2010	10:57:51 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:57:51 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:57:51 AM	Tube furnace set to 0
3/13/2010	10:58:12 AM	Helium valve closed
3/13/2010	10:58:12 AM	H2 valve closed
3/13/2010	10:58:12 AM	BCl3 valve closed
3/13/2010	10:58:12 AM	PH3 valve closed
3/13/2010	10:58:12 AM	SiCl4 pre valve closed
3/13/2010	10:58:12 AM	SiCl4 post valve closed
3/13/2010	10:58:12 AM	Bubbler valve closed
3/13/2010	10:58:12 AM	Main Vac valve opened
3/13/2010	10:58:12 AM	Bypass valve opened
3/13/2010	10:58:12 AM	Helium MFC set to  0.000000
3/13/2010	10:58:12 AM	H2 MFC set to  0.000000
3/13/2010	10:58:12 AM	BCl3 MFC set to  0.000000
3/13/2010	10:58:12 AM	SiCl4 MFC set to  0.000000
3/13/2010	10:58:12 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	10:58:12 AM	Tube furnace set to 0
3/13/2010	10:58:13 AM	Run finished at 10:58 AM
3/13/2010	10:58:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	10:59:39 AM	Helium MFC set to  100.000000
3/13/2010	10:59:39 AM	Helium valve opened
3/13/2010	11:03:31 AM	Helium MFC set to  0.000000
3/13/2010	11:03:32 AM	Helium valve closed
3/13/2010	11:04:18 AM	Helium MFC set to  0.000000
3/13/2010	11:04:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	11:04:28 AM	Recipe started at 11:04 AM
3/13/2010	11:04:28 AM	H2 valve closed
3/13/2010	11:04:28 AM	BCl3 valve closed
3/13/2010	11:04:28 AM	PH3 valve closed
3/13/2010	11:04:28 AM	SiCl4 pre valve closed
3/13/2010	11:04:28 AM	SiCl4 post valve closed
3/13/2010	11:04:28 AM	Main Vac valve closed
3/13/2010	11:04:28 AM	Bypass valve closed
3/13/2010	11:04:28 AM	Bubbler valve closed
3/13/2010	11:04:28 AM	Helium valve opened
3/13/2010	11:04:28 AM	Helium MFC set to  500.000000
3/13/2010	11:04:28 AM	H2 MFC set to  0.000000
3/13/2010	11:04:28 AM	BCl3 MFC set to  0.000000
3/13/2010	11:04:28 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:04:28 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:04:28 AM	Tube furnace set to 0
3/13/2010	11:04:55 AM	Run aborted at 11:04 AM
3/13/2010	11:04:55 AM	Helium valve closed
3/13/2010	11:04:55 AM	H2 valve closed
3/13/2010	11:04:55 AM	BCl3 valve closed
3/13/2010	11:04:55 AM	PH3 valve closed
3/13/2010	11:04:55 AM	SiCl4 pre valve closed
3/13/2010	11:04:55 AM	SiCl4 post valve closed
3/13/2010	11:04:55 AM	Bypass valve closed
3/13/2010	11:04:55 AM	Main Vac valve closed
3/13/2010	11:04:55 AM	Bubbler valve closed
3/13/2010	11:04:55 AM	Helium MFC set to  0.000000
3/13/2010	11:04:55 AM	H2 MFC set to  0.000000
3/13/2010	11:04:55 AM	BCl3 MFC set to  0.000000
3/13/2010	11:04:55 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:04:55 AM	Tube furnace set to 0
3/13/2010	11:04:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	11:04:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	11:04:58 AM	Recipe started at 11:04 AM
3/13/2010	11:04:58 AM	Helium valve closed
3/13/2010	11:04:58 AM	H2 valve closed
3/13/2010	11:04:58 AM	BCl3 valve closed
3/13/2010	11:04:58 AM	PH3 valve closed
3/13/2010	11:04:58 AM	SiCl4 pre valve closed
3/13/2010	11:04:58 AM	SiCl4 post valve closed
3/13/2010	11:04:58 AM	Main Vac valve closed
3/13/2010	11:04:58 AM	Bubbler valve closed
3/13/2010	11:04:58 AM	Bypass valve opened
3/13/2010	11:04:58 AM	Helium MFC set to  0.000000
3/13/2010	11:04:58 AM	H2 MFC set to  0.000000
3/13/2010	11:04:58 AM	BCl3 MFC set to  0.000000
3/13/2010	11:04:58 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:04:58 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:04:58 AM	Tube furnace set to 0
3/13/2010	11:05:14 AM	Helium valve closed
3/13/2010	11:05:14 AM	H2 valve closed
3/13/2010	11:05:14 AM	BCl3 valve closed
3/13/2010	11:05:14 AM	PH3 valve closed
3/13/2010	11:05:14 AM	SiCl4 pre valve closed
3/13/2010	11:05:14 AM	SiCl4 post valve closed
3/13/2010	11:05:14 AM	Bubbler valve closed
3/13/2010	11:05:14 AM	Main Vac valve opened
3/13/2010	11:05:14 AM	Bypass valve opened
3/13/2010	11:05:14 AM	Helium MFC set to  0.000000
3/13/2010	11:05:14 AM	H2 MFC set to  0.000000
3/13/2010	11:05:14 AM	BCl3 MFC set to  0.000000
3/13/2010	11:05:14 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:05:14 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:05:14 AM	Tube furnace set to 0
3/13/2010	11:05:14 AM	Run finished at 11:05 AM
3/13/2010	11:05:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	11:06:06 AM	Helium MFC set to  100.000000
3/13/2010	11:06:07 AM	Helium valve opened
3/13/2010	11:18:00 AM	Helium MFC set to  0.000000
3/13/2010	11:18:00 AM	Helium valve closed
3/13/2010	11:18:48 AM	Main Vac valve closed
3/13/2010	11:18:50 AM	Bypass valve closed
3/13/2010	11:19:02 AM	Bypass valve opened
3/13/2010	11:19:03 AM	Main Vac valve opened
3/13/2010	11:20:23 AM	Recipe started at 11:20 AM
3/13/2010	11:20:23 AM	Helium valve closed
3/13/2010	11:20:23 AM	BCl3 valve closed
3/13/2010	11:20:23 AM	PH3 valve closed
3/13/2010	11:20:23 AM	SiCl4 pre valve closed
3/13/2010	11:20:23 AM	SiCl4 post valve closed
3/13/2010	11:20:23 AM	Main Vac valve closed
3/13/2010	11:20:23 AM	Bypass valve closed
3/13/2010	11:20:23 AM	Bubbler valve closed
3/13/2010	11:20:23 AM	H2 valve opened
3/13/2010	11:20:23 AM	Helium MFC set to  0.000000
3/13/2010	11:20:23 AM	H2 MFC set to  500.000000
3/13/2010	11:20:23 AM	BCl3 MFC set to  0.000000
3/13/2010	11:20:23 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:20:23 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:20:23 AM	Tube furnace set to 0
3/13/2010	11:21:46 AM	Helium valve closed
3/13/2010	11:21:46 AM	BCl3 valve closed
3/13/2010	11:21:46 AM	PH3 valve closed
3/13/2010	11:21:46 AM	SiCl4 pre valve closed
3/13/2010	11:21:46 AM	SiCl4 post valve closed
3/13/2010	11:21:46 AM	Main Vac valve closed
3/13/2010	11:21:46 AM	Bypass valve closed
3/13/2010	11:21:46 AM	H2 valve opened
3/13/2010	11:21:46 AM	Bubbler valve opened
3/13/2010	11:21:46 AM	Helium MFC set to  0.000000
3/13/2010	11:21:46 AM	H2 MFC set to  500.000000
3/13/2010	11:21:46 AM	BCl3 MFC set to  0.000000
3/13/2010	11:21:46 AM	SiCl4 MFC set to  0.000000
3/13/2010	11:21:46 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:21:46 AM	Tube furnace set to 0
3/13/2010	11:41:46 AM	Helium valve closed
3/13/2010	11:41:46 AM	PH3 valve closed
3/13/2010	11:41:46 AM	Main Vac valve closed
3/13/2010	11:41:46 AM	Bypass valve closed
3/13/2010	11:41:46 AM	H2 valve opened
3/13/2010	11:41:46 AM	BCl3 valve opened
3/13/2010	11:41:46 AM	SiCl4 pre valve opened
3/13/2010	11:41:46 AM	SiCl4 post valve opened
3/13/2010	11:41:46 AM	Bubbler valve opened
3/13/2010	11:41:46 AM	Helium MFC set to  0.000000
3/13/2010	11:41:46 AM	H2 MFC set to  475.000000
3/13/2010	11:41:46 AM	BCl3 MFC set to  25.000000
3/13/2010	11:41:46 AM	SiCl4 MFC set to  325.000000
3/13/2010	11:41:46 AM	Bypass solenoid MFC set to  0.000000
3/13/2010	11:41:46 AM	Tube furnace set to 0
3/13/2010	12:01:46 PM	Helium valve closed
3/13/2010	12:01:46 PM	BCl3 valve closed
3/13/2010	12:01:46 PM	PH3 valve closed
3/13/2010	12:01:46 PM	SiCl4 pre valve closed
3/13/2010	12:01:46 PM	SiCl4 post valve closed
3/13/2010	12:01:46 PM	Main Vac valve closed
3/13/2010	12:01:46 PM	Bypass valve closed
3/13/2010	12:01:46 PM	H2 valve opened
3/13/2010	12:01:46 PM	Bubbler valve opened
3/13/2010	12:01:46 PM	Helium MFC set to  0.000000
3/13/2010	12:01:46 PM	H2 MFC set to  500.000000
3/13/2010	12:01:46 PM	BCl3 MFC set to  0.000000
3/13/2010	12:01:46 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:01:46 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:01:46 PM	Tube furnace set to 0
3/13/2010	12:21:46 PM	H2 valve closed
3/13/2010	12:21:46 PM	BCl3 valve closed
3/13/2010	12:21:47 PM	PH3 valve closed
3/13/2010	12:21:47 PM	SiCl4 pre valve closed
3/13/2010	12:21:47 PM	SiCl4 post valve closed
3/13/2010	12:21:47 PM	Main Vac valve closed
3/13/2010	12:21:47 PM	Bypass valve closed
3/13/2010	12:21:47 PM	Helium valve opened
3/13/2010	12:21:47 PM	Bubbler valve opened
3/13/2010	12:21:47 PM	Helium MFC set to  500.000000
3/13/2010	12:21:47 PM	H2 MFC set to  0.000000
3/13/2010	12:21:47 PM	BCl3 MFC set to  0.000000
3/13/2010	12:21:47 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:21:47 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:21:47 PM	Tube furnace set to 0
3/13/2010	12:36:47 PM	Helium valve closed
3/13/2010	12:36:47 PM	H2 valve closed
3/13/2010	12:36:47 PM	BCl3 valve closed
3/13/2010	12:36:47 PM	PH3 valve closed
3/13/2010	12:36:47 PM	SiCl4 pre valve closed
3/13/2010	12:36:47 PM	SiCl4 post valve closed
3/13/2010	12:36:47 PM	Main Vac valve closed
3/13/2010	12:36:47 PM	Bypass valve closed
3/13/2010	12:36:47 PM	Bubbler valve closed
3/13/2010	12:36:47 PM	Helium MFC set to  0.000000
3/13/2010	12:36:47 PM	H2 MFC set to  0.000000
3/13/2010	12:36:47 PM	BCl3 MFC set to  0.000000
3/13/2010	12:36:47 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:36:47 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:36:47 PM	Tube furnace set to 0
3/13/2010	12:36:47 PM	Run finished at 12:36 PM
3/13/2010	12:45:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	12:45:05 PM	Recipe started at 12:45 PM
3/13/2010	12:45:05 PM	Helium valve closed
3/13/2010	12:45:05 PM	H2 valve closed
3/13/2010	12:45:05 PM	BCl3 valve closed
3/13/2010	12:45:05 PM	PH3 valve closed
3/13/2010	12:45:05 PM	SiCl4 pre valve closed
3/13/2010	12:45:05 PM	SiCl4 post valve closed
3/13/2010	12:45:05 PM	Main Vac valve closed
3/13/2010	12:45:05 PM	Bubbler valve closed
3/13/2010	12:45:05 PM	Bypass valve opened
3/13/2010	12:45:05 PM	Helium MFC set to  0.000000
3/13/2010	12:45:05 PM	H2 MFC set to  0.000000
3/13/2010	12:45:05 PM	BCl3 MFC set to  0.000000
3/13/2010	12:45:05 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:45:05 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:45:05 PM	Tube furnace set to 0
3/13/2010	12:45:36 PM	Helium valve closed
3/13/2010	12:45:36 PM	H2 valve closed
3/13/2010	12:45:36 PM	BCl3 valve closed
3/13/2010	12:45:36 PM	PH3 valve closed
3/13/2010	12:45:36 PM	SiCl4 pre valve closed
3/13/2010	12:45:36 PM	SiCl4 post valve closed
3/13/2010	12:45:36 PM	Bubbler valve closed
3/13/2010	12:45:36 PM	Main Vac valve opened
3/13/2010	12:45:36 PM	Bypass valve opened
3/13/2010	12:45:36 PM	Helium MFC set to  0.000000
3/13/2010	12:45:36 PM	H2 MFC set to  0.000000
3/13/2010	12:45:36 PM	BCl3 MFC set to  0.000000
3/13/2010	12:45:36 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:45:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:45:36 PM	Tube furnace set to 0
3/13/2010	12:45:36 PM	Run finished at 12:45 PM
3/13/2010	12:45:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	12:54:04 PM	Helium MFC set to  100.000000
3/13/2010	12:54:05 PM	Helium valve opened
3/13/2010	12:57:19 PM	Helium MFC set to  0.000000
3/13/2010	12:57:20 PM	Helium valve closed
3/13/2010	12:58:14 PM	Main Vac valve closed
3/13/2010	12:58:16 PM	Bypass valve closed
3/13/2010	12:58:25 PM	Bypass valve opened
3/13/2010	12:58:27 PM	Main Vac valve opened
3/13/2010	12:58:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	12:58:51 PM	Recipe started at 12:58 PM
3/13/2010	12:58:51 PM	H2 valve closed
3/13/2010	12:58:51 PM	BCl3 valve closed
3/13/2010	12:58:51 PM	PH3 valve closed
3/13/2010	12:58:51 PM	SiCl4 pre valve closed
3/13/2010	12:58:51 PM	SiCl4 post valve closed
3/13/2010	12:58:51 PM	Main Vac valve closed
3/13/2010	12:58:51 PM	Bypass valve closed
3/13/2010	12:58:51 PM	Bubbler valve closed
3/13/2010	12:58:51 PM	Helium valve opened
3/13/2010	12:58:51 PM	Helium MFC set to  500.000000
3/13/2010	12:58:51 PM	H2 MFC set to  0.000000
3/13/2010	12:58:51 PM	BCl3 MFC set to  0.000000
3/13/2010	12:58:51 PM	SiCl4 MFC set to  0.000000
3/13/2010	12:58:51 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	12:58:51 PM	Tube furnace set to 0
3/13/2010	1:00:11 PM	Helium valve closed
3/13/2010	1:00:11 PM	H2 valve closed
3/13/2010	1:00:11 PM	BCl3 valve closed
3/13/2010	1:00:11 PM	PH3 valve closed
3/13/2010	1:00:11 PM	SiCl4 pre valve closed
3/13/2010	1:00:11 PM	SiCl4 post valve closed
3/13/2010	1:00:11 PM	Main Vac valve closed
3/13/2010	1:00:11 PM	Bypass valve closed
3/13/2010	1:00:11 PM	Bubbler valve closed
3/13/2010	1:00:11 PM	Helium MFC set to  0.000000
3/13/2010	1:00:11 PM	H2 MFC set to  0.000000
3/13/2010	1:00:11 PM	BCl3 MFC set to  0.000000
3/13/2010	1:00:11 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:00:11 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:00:11 PM	Tube furnace set to 0
3/13/2010	1:00:11 PM	Run finished at 1:00 PM
3/13/2010	1:00:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	1:02:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	1:02:54 PM	Recipe started at 1:02 PM
3/13/2010	1:02:54 PM	Helium valve closed
3/13/2010	1:02:54 PM	H2 valve closed
3/13/2010	1:02:54 PM	BCl3 valve closed
3/13/2010	1:02:54 PM	PH3 valve closed
3/13/2010	1:02:54 PM	SiCl4 pre valve closed
3/13/2010	1:02:54 PM	SiCl4 post valve closed
3/13/2010	1:02:54 PM	Main Vac valve closed
3/13/2010	1:02:54 PM	Bubbler valve closed
3/13/2010	1:02:54 PM	Bypass valve opened
3/13/2010	1:02:54 PM	Helium MFC set to  0.000000
3/13/2010	1:02:54 PM	H2 MFC set to  0.000000
3/13/2010	1:02:54 PM	BCl3 MFC set to  0.000000
3/13/2010	1:02:54 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:02:54 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:02:54 PM	Tube furnace set to 0
3/13/2010	1:03:16 PM	Helium valve closed
3/13/2010	1:03:16 PM	H2 valve closed
3/13/2010	1:03:16 PM	BCl3 valve closed
3/13/2010	1:03:16 PM	PH3 valve closed
3/13/2010	1:03:16 PM	SiCl4 pre valve closed
3/13/2010	1:03:16 PM	SiCl4 post valve closed
3/13/2010	1:03:16 PM	Bubbler valve closed
3/13/2010	1:03:16 PM	Main Vac valve opened
3/13/2010	1:03:16 PM	Bypass valve opened
3/13/2010	1:03:16 PM	Helium MFC set to  0.000000
3/13/2010	1:03:16 PM	H2 MFC set to  0.000000
3/13/2010	1:03:16 PM	BCl3 MFC set to  0.000000
3/13/2010	1:03:16 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:03:16 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:03:16 PM	Tube furnace set to 0
3/13/2010	1:03:16 PM	Run finished at 1:03 PM
3/13/2010	1:03:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	1:08:10 PM	Main Vac valve closed
3/13/2010	1:08:12 PM	Bypass valve closed
3/13/2010	1:12:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	1:12:27 PM	Recipe started at 1:12 PM
3/13/2010	1:12:27 PM	Helium valve closed
3/13/2010	1:12:27 PM	H2 valve closed
3/13/2010	1:12:27 PM	BCl3 valve closed
3/13/2010	1:12:27 PM	PH3 valve closed
3/13/2010	1:12:27 PM	SiCl4 pre valve closed
3/13/2010	1:12:27 PM	SiCl4 post valve closed
3/13/2010	1:12:27 PM	Main Vac valve closed
3/13/2010	1:12:27 PM	Bubbler valve closed
3/13/2010	1:12:27 PM	Bypass valve opened
3/13/2010	1:12:27 PM	Helium MFC set to  0.000000
3/13/2010	1:12:27 PM	H2 MFC set to  0.000000
3/13/2010	1:12:27 PM	BCl3 MFC set to  0.000000
3/13/2010	1:12:27 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:12:27 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:12:27 PM	Tube furnace set to 0
3/13/2010	1:13:02 PM	Helium valve closed
3/13/2010	1:13:02 PM	H2 valve closed
3/13/2010	1:13:02 PM	BCl3 valve closed
3/13/2010	1:13:02 PM	PH3 valve closed
3/13/2010	1:13:02 PM	SiCl4 pre valve closed
3/13/2010	1:13:02 PM	SiCl4 post valve closed
3/13/2010	1:13:02 PM	Bubbler valve closed
3/13/2010	1:13:02 PM	Main Vac valve opened
3/13/2010	1:13:02 PM	Bypass valve opened
3/13/2010	1:13:02 PM	Helium MFC set to  0.000000
3/13/2010	1:13:02 PM	H2 MFC set to  0.000000
3/13/2010	1:13:02 PM	BCl3 MFC set to  0.000000
3/13/2010	1:13:02 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:13:02 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:13:02 PM	Tube furnace set to 0
3/13/2010	1:13:02 PM	Run finished at 1:13 PM
3/13/2010	1:13:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	1:14:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/13/2010	1:14:48 PM	Recipe started at 1:14 PM
3/13/2010	1:14:48 PM	H2 valve closed
3/13/2010	1:14:48 PM	BCl3 valve closed
3/13/2010	1:14:48 PM	PH3 valve closed
3/13/2010	1:14:48 PM	SiCl4 pre valve closed
3/13/2010	1:14:48 PM	SiCl4 post valve closed
3/13/2010	1:14:48 PM	Main Vac valve closed
3/13/2010	1:14:48 PM	Bypass valve closed
3/13/2010	1:14:48 PM	Bubbler valve closed
3/13/2010	1:14:48 PM	Helium valve opened
3/13/2010	1:14:48 PM	Helium MFC set to  500.000000
3/13/2010	1:14:48 PM	H2 MFC set to  0.000000
3/13/2010	1:14:48 PM	BCl3 MFC set to  0.000000
3/13/2010	1:14:48 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:14:48 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:14:48 PM	Tube furnace set to 0
3/13/2010	1:15:18 PM	Helium valve closed
3/13/2010	1:15:18 PM	H2 valve closed
3/13/2010	1:15:18 PM	BCl3 valve closed
3/13/2010	1:15:18 PM	PH3 valve closed
3/13/2010	1:15:18 PM	SiCl4 pre valve closed
3/13/2010	1:15:18 PM	SiCl4 post valve closed
3/13/2010	1:15:18 PM	Main Vac valve closed
3/13/2010	1:15:18 PM	Bypass valve closed
3/13/2010	1:15:18 PM	Bubbler valve closed
3/13/2010	1:15:18 PM	Helium MFC set to  0.000000
3/13/2010	1:15:18 PM	H2 MFC set to  0.000000
3/13/2010	1:15:18 PM	BCl3 MFC set to  0.000000
3/13/2010	1:15:18 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:15:18 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:15:18 PM	Tube furnace set to 0
3/13/2010	1:15:33 PM	Helium valve closed
3/13/2010	1:15:33 PM	H2 valve closed
3/13/2010	1:15:33 PM	BCl3 valve closed
3/13/2010	1:15:33 PM	PH3 valve closed
3/13/2010	1:15:33 PM	SiCl4 pre valve closed
3/13/2010	1:15:33 PM	SiCl4 post valve closed
3/13/2010	1:15:33 PM	Main Vac valve closed
3/13/2010	1:15:33 PM	Bubbler valve closed
3/13/2010	1:15:33 PM	Bypass valve opened
3/13/2010	1:15:33 PM	Helium MFC set to  0.000000
3/13/2010	1:15:33 PM	H2 MFC set to  0.000000
3/13/2010	1:15:33 PM	BCl3 MFC set to  0.000000
3/13/2010	1:15:33 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:15:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:15:33 PM	Tube furnace set to 0
3/13/2010	1:15:50 PM	Helium valve closed
3/13/2010	1:15:50 PM	H2 valve closed
3/13/2010	1:15:50 PM	BCl3 valve closed
3/13/2010	1:15:50 PM	PH3 valve closed
3/13/2010	1:15:50 PM	SiCl4 pre valve closed
3/13/2010	1:15:50 PM	SiCl4 post valve closed
3/13/2010	1:15:50 PM	Bubbler valve closed
3/13/2010	1:15:50 PM	Main Vac valve opened
3/13/2010	1:15:50 PM	Bypass valve opened
3/13/2010	1:15:50 PM	Helium MFC set to  0.000000
3/13/2010	1:15:50 PM	H2 MFC set to  0.000000
3/13/2010	1:15:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:15:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:15:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:15:50 PM	Tube furnace set to 0
3/13/2010	1:20:50 PM	H2 valve closed
3/13/2010	1:20:50 PM	BCl3 valve closed
3/13/2010	1:20:50 PM	PH3 valve closed
3/13/2010	1:20:50 PM	SiCl4 pre valve closed
3/13/2010	1:20:50 PM	SiCl4 post valve closed
3/13/2010	1:20:50 PM	Main Vac valve closed
3/13/2010	1:20:50 PM	Bypass valve closed
3/13/2010	1:20:50 PM	Bubbler valve closed
3/13/2010	1:20:50 PM	Helium valve opened
3/13/2010	1:20:50 PM	Helium MFC set to  500.000000
3/13/2010	1:20:50 PM	H2 MFC set to  0.000000
3/13/2010	1:20:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:20:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:20:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:20:50 PM	Tube furnace set to 0
3/13/2010	1:22:13 PM	Helium valve closed
3/13/2010	1:22:13 PM	H2 valve closed
3/13/2010	1:22:13 PM	BCl3 valve closed
3/13/2010	1:22:13 PM	PH3 valve closed
3/13/2010	1:22:13 PM	SiCl4 pre valve closed
3/13/2010	1:22:13 PM	SiCl4 post valve closed
3/13/2010	1:22:13 PM	Main Vac valve closed
3/13/2010	1:22:13 PM	Bypass valve closed
3/13/2010	1:22:13 PM	Bubbler valve closed
3/13/2010	1:22:13 PM	Helium MFC set to  0.000000
3/13/2010	1:22:13 PM	H2 MFC set to  0.000000
3/13/2010	1:22:13 PM	BCl3 MFC set to  0.000000
3/13/2010	1:22:13 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:22:13 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:22:13 PM	Tube furnace set to 0
3/13/2010	1:22:28 PM	Helium valve closed
3/13/2010	1:22:28 PM	H2 valve closed
3/13/2010	1:22:28 PM	BCl3 valve closed
3/13/2010	1:22:28 PM	PH3 valve closed
3/13/2010	1:22:28 PM	SiCl4 pre valve closed
3/13/2010	1:22:28 PM	SiCl4 post valve closed
3/13/2010	1:22:28 PM	Main Vac valve closed
3/13/2010	1:22:28 PM	Bubbler valve closed
3/13/2010	1:22:28 PM	Bypass valve opened
3/13/2010	1:22:28 PM	Helium MFC set to  0.000000
3/13/2010	1:22:28 PM	H2 MFC set to  0.000000
3/13/2010	1:22:28 PM	BCl3 MFC set to  0.000000
3/13/2010	1:22:28 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:22:28 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:22:28 PM	Tube furnace set to 0
3/13/2010	1:22:50 PM	Helium valve closed
3/13/2010	1:22:50 PM	H2 valve closed
3/13/2010	1:22:50 PM	BCl3 valve closed
3/13/2010	1:22:50 PM	PH3 valve closed
3/13/2010	1:22:50 PM	SiCl4 pre valve closed
3/13/2010	1:22:50 PM	SiCl4 post valve closed
3/13/2010	1:22:50 PM	Bubbler valve closed
3/13/2010	1:22:50 PM	Main Vac valve opened
3/13/2010	1:22:50 PM	Bypass valve opened
3/13/2010	1:22:50 PM	Helium MFC set to  0.000000
3/13/2010	1:22:50 PM	H2 MFC set to  0.000000
3/13/2010	1:22:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:22:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:22:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:22:50 PM	Tube furnace set to 0
3/13/2010	1:27:50 PM	H2 valve closed
3/13/2010	1:27:50 PM	BCl3 valve closed
3/13/2010	1:27:50 PM	PH3 valve closed
3/13/2010	1:27:50 PM	SiCl4 pre valve closed
3/13/2010	1:27:50 PM	SiCl4 post valve closed
3/13/2010	1:27:50 PM	Main Vac valve closed
3/13/2010	1:27:50 PM	Bypass valve closed
3/13/2010	1:27:50 PM	Bubbler valve closed
3/13/2010	1:27:50 PM	Helium valve opened
3/13/2010	1:27:50 PM	Helium MFC set to  500.000000
3/13/2010	1:27:50 PM	H2 MFC set to  0.000000
3/13/2010	1:27:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:27:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:27:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:27:50 PM	Tube furnace set to 0
3/13/2010	1:29:13 PM	Helium valve closed
3/13/2010	1:29:13 PM	H2 valve closed
3/13/2010	1:29:13 PM	BCl3 valve closed
3/13/2010	1:29:13 PM	PH3 valve closed
3/13/2010	1:29:13 PM	SiCl4 pre valve closed
3/13/2010	1:29:13 PM	SiCl4 post valve closed
3/13/2010	1:29:13 PM	Main Vac valve closed
3/13/2010	1:29:13 PM	Bypass valve closed
3/13/2010	1:29:13 PM	Bubbler valve closed
3/13/2010	1:29:13 PM	Helium MFC set to  0.000000
3/13/2010	1:29:13 PM	H2 MFC set to  0.000000
3/13/2010	1:29:13 PM	BCl3 MFC set to  0.000000
3/13/2010	1:29:13 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:29:13 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:29:13 PM	Tube furnace set to 0
3/13/2010	1:29:28 PM	Helium valve closed
3/13/2010	1:29:28 PM	H2 valve closed
3/13/2010	1:29:28 PM	BCl3 valve closed
3/13/2010	1:29:28 PM	PH3 valve closed
3/13/2010	1:29:28 PM	SiCl4 pre valve closed
3/13/2010	1:29:28 PM	SiCl4 post valve closed
3/13/2010	1:29:28 PM	Main Vac valve closed
3/13/2010	1:29:28 PM	Bubbler valve closed
3/13/2010	1:29:28 PM	Bypass valve opened
3/13/2010	1:29:28 PM	Helium MFC set to  0.000000
3/13/2010	1:29:28 PM	H2 MFC set to  0.000000
3/13/2010	1:29:28 PM	BCl3 MFC set to  0.000000
3/13/2010	1:29:28 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:29:28 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:29:28 PM	Tube furnace set to 0
3/13/2010	1:29:50 PM	Helium valve closed
3/13/2010	1:29:50 PM	H2 valve closed
3/13/2010	1:29:50 PM	BCl3 valve closed
3/13/2010	1:29:50 PM	PH3 valve closed
3/13/2010	1:29:50 PM	SiCl4 pre valve closed
3/13/2010	1:29:50 PM	SiCl4 post valve closed
3/13/2010	1:29:50 PM	Bubbler valve closed
3/13/2010	1:29:50 PM	Main Vac valve opened
3/13/2010	1:29:50 PM	Bypass valve opened
3/13/2010	1:29:50 PM	Helium MFC set to  0.000000
3/13/2010	1:29:50 PM	H2 MFC set to  0.000000
3/13/2010	1:29:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:29:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:29:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:29:50 PM	Tube furnace set to 0
3/13/2010	1:34:50 PM	Helium valve closed
3/13/2010	1:34:50 PM	H2 valve closed
3/13/2010	1:34:50 PM	BCl3 valve closed
3/13/2010	1:34:50 PM	PH3 valve closed
3/13/2010	1:34:50 PM	SiCl4 pre valve closed
3/13/2010	1:34:50 PM	SiCl4 post valve closed
3/13/2010	1:34:50 PM	Bubbler valve closed
3/13/2010	1:34:50 PM	Main Vac valve opened
3/13/2010	1:34:50 PM	Bypass valve opened
3/13/2010	1:34:50 PM	Helium MFC set to  0.000000
3/13/2010	1:34:50 PM	H2 MFC set to  0.000000
3/13/2010	1:34:50 PM	BCl3 MFC set to  0.000000
3/13/2010	1:34:50 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:34:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:34:50 PM	Tube furnace set to 0
3/13/2010	1:34:51 PM	Run finished at 1:34 PM
3/13/2010	1:34:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/13/2010	1:35:18 PM	Main Vac valve closed
3/13/2010	1:35:20 PM	Bypass valve closed
3/13/2010	1:35:33 PM	Bypass valve opened
3/13/2010	1:35:34 PM	Main Vac valve opened
3/13/2010	1:35:43 PM	Helium MFC set to  100.000000
3/13/2010	1:35:44 PM	Helium valve opened
3/13/2010	1:38:05 PM	Helium MFC set to  0.000000
3/13/2010	1:38:06 PM	Helium valve closed
3/13/2010	1:39:06 PM	Recipe started at 1:39 PM
3/13/2010	1:39:06 PM	Helium valve closed
3/13/2010	1:39:06 PM	BCl3 valve closed
3/13/2010	1:39:06 PM	PH3 valve closed
3/13/2010	1:39:06 PM	SiCl4 pre valve closed
3/13/2010	1:39:06 PM	SiCl4 post valve closed
3/13/2010	1:39:06 PM	Main Vac valve closed
3/13/2010	1:39:06 PM	Bypass valve closed
3/13/2010	1:39:06 PM	Bubbler valve closed
3/13/2010	1:39:06 PM	H2 valve opened
3/13/2010	1:39:06 PM	Helium MFC set to  0.000000
3/13/2010	1:39:06 PM	H2 MFC set to  500.000000
3/13/2010	1:39:06 PM	BCl3 MFC set to  0.000000
3/13/2010	1:39:06 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:39:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:39:06 PM	Tube furnace set to 0
3/13/2010	1:39:47 PM	Run aborted at 1:39 PM
3/13/2010	1:39:47 PM	Helium valve closed
3/13/2010	1:39:47 PM	H2 valve closed
3/13/2010	1:39:47 PM	BCl3 valve closed
3/13/2010	1:39:47 PM	PH3 valve closed
3/13/2010	1:39:47 PM	SiCl4 pre valve closed
3/13/2010	1:39:47 PM	SiCl4 post valve closed
3/13/2010	1:39:47 PM	Bypass valve closed
3/13/2010	1:39:47 PM	Main Vac valve closed
3/13/2010	1:39:47 PM	Bubbler valve closed
3/13/2010	1:39:47 PM	Helium MFC set to  0.000000
3/13/2010	1:39:47 PM	H2 MFC set to  0.000000
3/13/2010	1:39:47 PM	BCl3 MFC set to  0.000000
3/13/2010	1:39:47 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:39:47 PM	Tube furnace set to 0
3/13/2010	1:40:18 PM	Recipe started at 1:40 PM
3/13/2010	1:40:18 PM	Helium valve closed
3/13/2010	1:40:18 PM	BCl3 valve closed
3/13/2010	1:40:18 PM	PH3 valve closed
3/13/2010	1:40:18 PM	SiCl4 pre valve closed
3/13/2010	1:40:18 PM	SiCl4 post valve closed
3/13/2010	1:40:18 PM	Main Vac valve closed
3/13/2010	1:40:18 PM	Bypass valve closed
3/13/2010	1:40:18 PM	Bubbler valve closed
3/13/2010	1:40:18 PM	H2 valve opened
3/13/2010	1:40:18 PM	Helium MFC set to  0.000000
3/13/2010	1:40:18 PM	H2 MFC set to  500.000000
3/13/2010	1:40:18 PM	BCl3 MFC set to  0.000000
3/13/2010	1:40:18 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:40:18 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:40:18 PM	Tube furnace set to 0
3/13/2010	1:41:00 PM	Helium valve closed
3/13/2010	1:41:00 PM	BCl3 valve closed
3/13/2010	1:41:00 PM	PH3 valve closed
3/13/2010	1:41:00 PM	SiCl4 pre valve closed
3/13/2010	1:41:00 PM	SiCl4 post valve closed
3/13/2010	1:41:00 PM	Main Vac valve closed
3/13/2010	1:41:00 PM	Bypass valve closed
3/13/2010	1:41:00 PM	H2 valve opened
3/13/2010	1:41:00 PM	Bubbler valve opened
3/13/2010	1:41:00 PM	Helium MFC set to  0.000000
3/13/2010	1:41:00 PM	H2 MFC set to  500.000000
3/13/2010	1:41:00 PM	BCl3 MFC set to  0.000000
3/13/2010	1:41:00 PM	SiCl4 MFC set to  0.000000
3/13/2010	1:41:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:41:00 PM	Tube furnace set to 0
3/13/2010	1:58:00 PM	Helium valve closed
3/13/2010	1:58:00 PM	PH3 valve closed
3/13/2010	1:58:00 PM	Main Vac valve closed
3/13/2010	1:58:00 PM	Bypass valve closed
3/13/2010	1:58:00 PM	H2 valve opened
3/13/2010	1:58:00 PM	BCl3 valve opened
3/13/2010	1:58:00 PM	SiCl4 pre valve opened
3/13/2010	1:58:00 PM	SiCl4 post valve opened
3/13/2010	1:58:00 PM	Bubbler valve opened
3/13/2010	1:58:00 PM	Helium MFC set to  0.000000
3/13/2010	1:58:00 PM	H2 MFC set to  475.000000
3/13/2010	1:58:00 PM	BCl3 MFC set to  35.000000
3/13/2010	1:58:00 PM	SiCl4 MFC set to  325.000000
3/13/2010	1:58:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	1:58:00 PM	Tube furnace set to 0
3/13/2010	2:18:00 PM	Helium valve closed
3/13/2010	2:18:00 PM	BCl3 valve closed
3/13/2010	2:18:00 PM	PH3 valve closed
3/13/2010	2:18:00 PM	SiCl4 pre valve closed
3/13/2010	2:18:00 PM	SiCl4 post valve closed
3/13/2010	2:18:00 PM	Main Vac valve closed
3/13/2010	2:18:00 PM	Bypass valve closed
3/13/2010	2:18:00 PM	H2 valve opened
3/13/2010	2:18:00 PM	Bubbler valve opened
3/13/2010	2:18:00 PM	Helium MFC set to  0.000000
3/13/2010	2:18:00 PM	H2 MFC set to  400.000000
3/13/2010	2:18:00 PM	BCl3 MFC set to  0.000000
3/13/2010	2:18:00 PM	SiCl4 MFC set to  0.000000
3/13/2010	2:18:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	2:18:00 PM	Tube furnace set to 0
3/13/2010	2:38:00 PM	H2 valve closed
3/13/2010	2:38:00 PM	BCl3 valve closed
3/13/2010	2:38:00 PM	PH3 valve closed
3/13/2010	2:38:00 PM	SiCl4 pre valve closed
3/13/2010	2:38:00 PM	SiCl4 post valve closed
3/13/2010	2:38:00 PM	Main Vac valve closed
3/13/2010	2:38:00 PM	Bypass valve closed
3/13/2010	2:38:00 PM	Helium valve opened
3/13/2010	2:38:00 PM	Bubbler valve opened
3/13/2010	2:38:00 PM	Helium MFC set to  400.000000
3/13/2010	2:38:00 PM	H2 MFC set to  0.000000
3/13/2010	2:38:00 PM	BCl3 MFC set to  0.000000
3/13/2010	2:38:00 PM	SiCl4 MFC set to  0.000000
3/13/2010	2:38:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	2:38:00 PM	Tube furnace set to 0
3/13/2010	2:53:01 PM	Helium valve closed
3/13/2010	2:53:01 PM	H2 valve closed
3/13/2010	2:53:01 PM	BCl3 valve closed
3/13/2010	2:53:01 PM	PH3 valve closed
3/13/2010	2:53:01 PM	SiCl4 pre valve closed
3/13/2010	2:53:01 PM	SiCl4 post valve closed
3/13/2010	2:53:01 PM	Main Vac valve closed
3/13/2010	2:53:01 PM	Bypass valve closed
3/13/2010	2:53:01 PM	Bubbler valve closed
3/13/2010	2:53:01 PM	Helium MFC set to  0.000000
3/13/2010	2:53:01 PM	H2 MFC set to  0.000000
3/13/2010	2:53:01 PM	BCl3 MFC set to  0.000000
3/13/2010	2:53:01 PM	SiCl4 MFC set to  0.000000
3/13/2010	2:53:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	2:53:01 PM	Tube furnace set to 0
3/13/2010	2:53:01 PM	Run finished at 2:53 PM
3/13/2010	2:59:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	2:59:01 PM	Recipe started at 2:59 PM
3/13/2010	2:59:01 PM	Helium valve closed
3/13/2010	2:59:01 PM	H2 valve closed
3/13/2010	2:59:01 PM	BCl3 valve closed
3/13/2010	2:59:01 PM	PH3 valve closed
3/13/2010	2:59:01 PM	SiCl4 pre valve closed
3/13/2010	2:59:01 PM	SiCl4 post valve closed
3/13/2010	2:59:01 PM	Main Vac valve closed
3/13/2010	2:59:01 PM	Bubbler valve closed
3/13/2010	2:59:01 PM	Bypass valve opened
3/13/2010	2:59:01 PM	Helium MFC set to  0.000000
3/13/2010	2:59:01 PM	H2 MFC set to  0.000000
3/13/2010	2:59:01 PM	BCl3 MFC set to  0.000000
3/13/2010	2:59:01 PM	SiCl4 MFC set to  0.000000
3/13/2010	2:59:01 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	2:59:01 PM	Tube furnace set to 0
3/13/2010	2:59:31 PM	Helium valve closed
3/13/2010	2:59:31 PM	H2 valve closed
3/13/2010	2:59:31 PM	BCl3 valve closed
3/13/2010	2:59:31 PM	PH3 valve closed
3/13/2010	2:59:31 PM	SiCl4 pre valve closed
3/13/2010	2:59:31 PM	SiCl4 post valve closed
3/13/2010	2:59:31 PM	Bubbler valve closed
3/13/2010	2:59:31 PM	Main Vac valve opened
3/13/2010	2:59:31 PM	Bypass valve opened
3/13/2010	2:59:31 PM	Helium MFC set to  0.000000
3/13/2010	2:59:31 PM	H2 MFC set to  0.000000
3/13/2010	2:59:31 PM	BCl3 MFC set to  0.000000
3/13/2010	2:59:31 PM	SiCl4 MFC set to  0.000000
3/13/2010	2:59:31 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	2:59:31 PM	Tube furnace set to 0
3/13/2010	2:59:32 PM	Run finished at 2:59 PM
3/13/2010	2:59:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	3:02:03 PM	Helium MFC set to  100.000000
3/13/2010	3:02:04 PM	Helium valve opened
3/13/2010	3:05:29 PM	Helium MFC set to  0.000000
3/13/2010	3:05:30 PM	Helium valve closed
3/13/2010	3:06:19 PM	Main Vac valve closed
3/13/2010	3:06:22 PM	Bypass valve closed
3/13/2010	3:06:35 PM	Bypass valve opened
3/13/2010	3:06:39 PM	Main Vac valve opened
3/13/2010	3:09:12 PM	Recipe started at 3:09 PM
3/13/2010	3:09:12 PM	Helium valve closed
3/13/2010	3:09:12 PM	BCl3 valve closed
3/13/2010	3:09:12 PM	PH3 valve closed
3/13/2010	3:09:12 PM	SiCl4 pre valve closed
3/13/2010	3:09:12 PM	SiCl4 post valve closed
3/13/2010	3:09:12 PM	Main Vac valve closed
3/13/2010	3:09:12 PM	Bypass valve closed
3/13/2010	3:09:12 PM	Bubbler valve closed
3/13/2010	3:09:12 PM	H2 valve opened
3/13/2010	3:09:12 PM	Helium MFC set to  0.000000
3/13/2010	3:09:12 PM	H2 MFC set to  500.000000
3/13/2010	3:09:12 PM	BCl3 MFC set to  0.000000
3/13/2010	3:09:12 PM	SiCl4 MFC set to  0.000000
3/13/2010	3:09:12 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	3:09:12 PM	Tube furnace set to 0
3/13/2010	3:10:34 PM	Helium valve closed
3/13/2010	3:10:34 PM	BCl3 valve closed
3/13/2010	3:10:34 PM	PH3 valve closed
3/13/2010	3:10:34 PM	SiCl4 pre valve closed
3/13/2010	3:10:34 PM	SiCl4 post valve closed
3/13/2010	3:10:34 PM	Main Vac valve closed
3/13/2010	3:10:34 PM	Bypass valve closed
3/13/2010	3:10:34 PM	H2 valve opened
3/13/2010	3:10:34 PM	Bubbler valve opened
3/13/2010	3:10:34 PM	Helium MFC set to  0.000000
3/13/2010	3:10:34 PM	H2 MFC set to  500.000000
3/13/2010	3:10:34 PM	BCl3 MFC set to  0.000000
3/13/2010	3:10:34 PM	SiCl4 MFC set to  0.000000
3/13/2010	3:10:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	3:10:34 PM	Tube furnace set to 0
3/13/2010	3:30:34 PM	Helium valve closed
3/13/2010	3:30:34 PM	PH3 valve closed
3/13/2010	3:30:34 PM	Main Vac valve closed
3/13/2010	3:30:34 PM	Bypass valve closed
3/13/2010	3:30:34 PM	H2 valve opened
3/13/2010	3:30:34 PM	BCl3 valve opened
3/13/2010	3:30:34 PM	SiCl4 pre valve opened
3/13/2010	3:30:34 PM	SiCl4 post valve opened
3/13/2010	3:30:34 PM	Bubbler valve opened
3/13/2010	3:30:34 PM	Helium MFC set to  0.000000
3/13/2010	3:30:34 PM	H2 MFC set to  475.000000
3/13/2010	3:30:34 PM	BCl3 MFC set to  25.000000
3/13/2010	3:30:34 PM	SiCl4 MFC set to  325.000000
3/13/2010	3:30:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	3:30:34 PM	Tube furnace set to 0
3/13/2010	3:50:34 PM	Helium valve closed
3/13/2010	3:50:34 PM	BCl3 valve closed
3/13/2010	3:50:34 PM	PH3 valve closed
3/13/2010	3:50:34 PM	SiCl4 pre valve closed
3/13/2010	3:50:34 PM	SiCl4 post valve closed
3/13/2010	3:50:34 PM	Main Vac valve closed
3/13/2010	3:50:34 PM	Bypass valve closed
3/13/2010	3:50:34 PM	H2 valve opened
3/13/2010	3:50:34 PM	Bubbler valve opened
3/13/2010	3:50:34 PM	Helium MFC set to  0.000000
3/13/2010	3:50:34 PM	H2 MFC set to  400.000000
3/13/2010	3:50:34 PM	BCl3 MFC set to  0.000000
3/13/2010	3:50:34 PM	SiCl4 MFC set to  0.000000
3/13/2010	3:50:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	3:50:34 PM	Tube furnace set to 0
3/13/2010	4:10:34 PM	H2 valve closed
3/13/2010	4:10:34 PM	BCl3 valve closed
3/13/2010	4:10:34 PM	PH3 valve closed
3/13/2010	4:10:34 PM	SiCl4 pre valve closed
3/13/2010	4:10:34 PM	SiCl4 post valve closed
3/13/2010	4:10:34 PM	Main Vac valve closed
3/13/2010	4:10:34 PM	Bypass valve closed
3/13/2010	4:10:34 PM	Helium valve opened
3/13/2010	4:10:34 PM	Bubbler valve opened
3/13/2010	4:10:34 PM	Helium MFC set to  400.000000
3/13/2010	4:10:34 PM	H2 MFC set to  0.000000
3/13/2010	4:10:35 PM	BCl3 MFC set to  0.000000
3/13/2010	4:10:35 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:10:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:10:35 PM	Tube furnace set to 0
3/13/2010	4:25:35 PM	Helium valve closed
3/13/2010	4:25:35 PM	H2 valve closed
3/13/2010	4:25:35 PM	BCl3 valve closed
3/13/2010	4:25:35 PM	PH3 valve closed
3/13/2010	4:25:35 PM	SiCl4 pre valve closed
3/13/2010	4:25:35 PM	SiCl4 post valve closed
3/13/2010	4:25:35 PM	Main Vac valve closed
3/13/2010	4:25:35 PM	Bypass valve closed
3/13/2010	4:25:35 PM	Bubbler valve closed
3/13/2010	4:25:35 PM	Helium MFC set to  0.000000
3/13/2010	4:25:35 PM	H2 MFC set to  0.000000
3/13/2010	4:25:35 PM	BCl3 MFC set to  0.000000
3/13/2010	4:25:35 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:25:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:25:35 PM	Tube furnace set to 0
3/13/2010	4:25:35 PM	Run finished at 4:25 PM
3/13/2010	4:43:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	4:43:15 PM	Recipe started at 4:43 PM
3/13/2010	4:43:15 PM	Helium valve closed
3/13/2010	4:43:15 PM	H2 valve closed
3/13/2010	4:43:15 PM	BCl3 valve closed
3/13/2010	4:43:15 PM	PH3 valve closed
3/13/2010	4:43:15 PM	SiCl4 pre valve closed
3/13/2010	4:43:15 PM	SiCl4 post valve closed
3/13/2010	4:43:15 PM	Main Vac valve closed
3/13/2010	4:43:15 PM	Bubbler valve closed
3/13/2010	4:43:15 PM	Bypass valve opened
3/13/2010	4:43:15 PM	Helium MFC set to  0.000000
3/13/2010	4:43:15 PM	H2 MFC set to  0.000000
3/13/2010	4:43:15 PM	BCl3 MFC set to  0.000000
3/13/2010	4:43:15 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:43:15 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:43:15 PM	Tube furnace set to 0
3/13/2010	4:43:46 PM	Helium valve closed
3/13/2010	4:43:46 PM	H2 valve closed
3/13/2010	4:43:46 PM	BCl3 valve closed
3/13/2010	4:43:46 PM	PH3 valve closed
3/13/2010	4:43:46 PM	SiCl4 pre valve closed
3/13/2010	4:43:46 PM	SiCl4 post valve closed
3/13/2010	4:43:46 PM	Bubbler valve closed
3/13/2010	4:43:46 PM	Main Vac valve opened
3/13/2010	4:43:46 PM	Bypass valve opened
3/13/2010	4:43:46 PM	Helium MFC set to  0.000000
3/13/2010	4:43:46 PM	H2 MFC set to  0.000000
3/13/2010	4:43:46 PM	BCl3 MFC set to  0.000000
3/13/2010	4:43:46 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:43:46 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:43:46 PM	Tube furnace set to 0
3/13/2010	4:43:47 PM	Run finished at 4:43 PM
3/13/2010	4:43:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	4:44:32 PM	Helium MFC set to  100.000000
3/13/2010	4:44:32 PM	Helium valve opened
3/13/2010	4:45:34 PM	Helium MFC set to  0.000000
3/13/2010	4:45:34 PM	Helium valve closed
3/13/2010	4:45:58 PM	Main Vac valve closed
3/13/2010	4:45:59 PM	Bypass valve closed
3/13/2010	4:46:08 PM	Bypass valve opened
3/13/2010	4:46:11 PM	Main Vac valve opened
3/13/2010	4:47:10 PM	Recipe started at 4:47 PM
3/13/2010	4:47:10 PM	Helium valve closed
3/13/2010	4:47:10 PM	BCl3 valve closed
3/13/2010	4:47:10 PM	PH3 valve closed
3/13/2010	4:47:10 PM	SiCl4 pre valve closed
3/13/2010	4:47:10 PM	SiCl4 post valve closed
3/13/2010	4:47:10 PM	Main Vac valve closed
3/13/2010	4:47:10 PM	Bypass valve closed
3/13/2010	4:47:10 PM	Bubbler valve closed
3/13/2010	4:47:10 PM	H2 valve opened
3/13/2010	4:47:10 PM	Helium MFC set to  0.000000
3/13/2010	4:47:10 PM	H2 MFC set to  500.000000
3/13/2010	4:47:10 PM	BCl3 MFC set to  0.000000
3/13/2010	4:47:10 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:47:10 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:47:10 PM	Tube furnace set to 0
3/13/2010	4:48:32 PM	Helium valve closed
3/13/2010	4:48:32 PM	BCl3 valve closed
3/13/2010	4:48:32 PM	PH3 valve closed
3/13/2010	4:48:32 PM	SiCl4 pre valve closed
3/13/2010	4:48:32 PM	SiCl4 post valve closed
3/13/2010	4:48:32 PM	Main Vac valve closed
3/13/2010	4:48:32 PM	Bypass valve closed
3/13/2010	4:48:32 PM	H2 valve opened
3/13/2010	4:48:32 PM	Bubbler valve opened
3/13/2010	4:48:32 PM	Helium MFC set to  0.000000
3/13/2010	4:48:32 PM	H2 MFC set to  500.000000
3/13/2010	4:48:32 PM	BCl3 MFC set to  0.000000
3/13/2010	4:48:32 PM	SiCl4 MFC set to  0.000000
3/13/2010	4:48:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	4:48:32 PM	Tube furnace set to 0
3/13/2010	5:08:32 PM	Helium valve closed
3/13/2010	5:08:32 PM	BCl3 valve closed
3/13/2010	5:08:32 PM	PH3 valve closed
3/13/2010	5:08:32 PM	SiCl4 pre valve closed
3/13/2010	5:08:32 PM	SiCl4 post valve closed
3/13/2010	5:08:32 PM	Main Vac valve closed
3/13/2010	5:08:32 PM	Bypass valve closed
3/13/2010	5:08:32 PM	H2 valve opened
3/13/2010	5:08:32 PM	Bubbler valve opened
3/13/2010	5:08:32 PM	Helium MFC set to  0.000000
3/13/2010	5:08:32 PM	H2 MFC set to  500.000000
3/13/2010	5:08:32 PM	BCl3 MFC set to  0.000000
3/13/2010	5:08:32 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:08:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:08:32 PM	Tube furnace set to 0
3/13/2010	5:13:32 PM	H2 valve closed
3/13/2010	5:13:32 PM	BCl3 valve closed
3/13/2010	5:13:32 PM	PH3 valve closed
3/13/2010	5:13:32 PM	SiCl4 pre valve closed
3/13/2010	5:13:32 PM	SiCl4 post valve closed
3/13/2010	5:13:32 PM	Main Vac valve closed
3/13/2010	5:13:32 PM	Bypass valve closed
3/13/2010	5:13:32 PM	Helium valve opened
3/13/2010	5:13:32 PM	Bubbler valve opened
3/13/2010	5:13:32 PM	Helium MFC set to  500.000000
3/13/2010	5:13:32 PM	H2 MFC set to  0.000000
3/13/2010	5:13:32 PM	BCl3 MFC set to  0.000000
3/13/2010	5:13:32 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:13:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:13:32 PM	Tube furnace set to 0
3/13/2010	5:18:33 PM	Helium valve closed
3/13/2010	5:18:33 PM	H2 valve closed
3/13/2010	5:18:33 PM	BCl3 valve closed
3/13/2010	5:18:33 PM	PH3 valve closed
3/13/2010	5:18:33 PM	SiCl4 pre valve closed
3/13/2010	5:18:33 PM	SiCl4 post valve closed
3/13/2010	5:18:33 PM	Main Vac valve closed
3/13/2010	5:18:33 PM	Bypass valve closed
3/13/2010	5:18:33 PM	Bubbler valve closed
3/13/2010	5:18:33 PM	Helium MFC set to  0.000000
3/13/2010	5:18:33 PM	H2 MFC set to  0.000000
3/13/2010	5:18:33 PM	BCl3 MFC set to  0.000000
3/13/2010	5:18:33 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:18:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:18:33 PM	Tube furnace set to 0
3/13/2010	5:18:33 PM	Run finished at 5:18 PM
3/13/2010	5:20:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	5:20:41 PM	Recipe started at 5:20 PM
3/13/2010	5:20:41 PM	Helium valve closed
3/13/2010	5:20:41 PM	H2 valve closed
3/13/2010	5:20:41 PM	BCl3 valve closed
3/13/2010	5:20:41 PM	PH3 valve closed
3/13/2010	5:20:41 PM	SiCl4 pre valve closed
3/13/2010	5:20:41 PM	SiCl4 post valve closed
3/13/2010	5:20:41 PM	Main Vac valve closed
3/13/2010	5:20:41 PM	Bubbler valve closed
3/13/2010	5:20:41 PM	Bypass valve opened
3/13/2010	5:20:41 PM	Helium MFC set to  0.000000
3/13/2010	5:20:41 PM	H2 MFC set to  0.000000
3/13/2010	5:20:41 PM	BCl3 MFC set to  0.000000
3/13/2010	5:20:41 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:20:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:20:41 PM	Tube furnace set to 0
3/13/2010	5:21:07 PM	Helium valve closed
3/13/2010	5:21:07 PM	H2 valve closed
3/13/2010	5:21:07 PM	BCl3 valve closed
3/13/2010	5:21:07 PM	PH3 valve closed
3/13/2010	5:21:07 PM	SiCl4 pre valve closed
3/13/2010	5:21:07 PM	SiCl4 post valve closed
3/13/2010	5:21:07 PM	Bubbler valve closed
3/13/2010	5:21:07 PM	Main Vac valve opened
3/13/2010	5:21:07 PM	Bypass valve opened
3/13/2010	5:21:07 PM	Helium MFC set to  0.000000
3/13/2010	5:21:07 PM	H2 MFC set to  0.000000
3/13/2010	5:21:07 PM	BCl3 MFC set to  0.000000
3/13/2010	5:21:07 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:21:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:21:07 PM	Tube furnace set to 0
3/13/2010	5:21:07 PM	Run finished at 5:21 PM
3/13/2010	5:21:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	5:29:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	5:29:42 PM	Recipe started at 5:29 PM
3/13/2010	5:29:42 PM	H2 valve closed
3/13/2010	5:29:42 PM	BCl3 valve closed
3/13/2010	5:29:42 PM	PH3 valve closed
3/13/2010	5:29:42 PM	SiCl4 pre valve closed
3/13/2010	5:29:42 PM	SiCl4 post valve closed
3/13/2010	5:29:42 PM	Main Vac valve closed
3/13/2010	5:29:42 PM	Bypass valve closed
3/13/2010	5:29:42 PM	Bubbler valve closed
3/13/2010	5:29:42 PM	Helium valve opened
3/13/2010	5:29:42 PM	Helium MFC set to  500.000000
3/13/2010	5:29:42 PM	H2 MFC set to  0.000000
3/13/2010	5:29:43 PM	BCl3 MFC set to  0.000000
3/13/2010	5:29:43 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:29:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:29:43 PM	Tube furnace set to 0
3/13/2010	5:31:00 PM	Helium valve closed
3/13/2010	5:31:00 PM	H2 valve closed
3/13/2010	5:31:00 PM	BCl3 valve closed
3/13/2010	5:31:00 PM	PH3 valve closed
3/13/2010	5:31:00 PM	SiCl4 pre valve closed
3/13/2010	5:31:00 PM	SiCl4 post valve closed
3/13/2010	5:31:00 PM	Main Vac valve closed
3/13/2010	5:31:00 PM	Bypass valve closed
3/13/2010	5:31:00 PM	Bubbler valve closed
3/13/2010	5:31:00 PM	Helium MFC set to  0.000000
3/13/2010	5:31:00 PM	H2 MFC set to  0.000000
3/13/2010	5:31:00 PM	BCl3 MFC set to  0.000000
3/13/2010	5:31:00 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:31:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:31:00 PM	Tube furnace set to 0
3/13/2010	5:31:00 PM	Run finished at 5:31 PM
3/13/2010	5:31:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	5:33:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	5:33:15 PM	Recipe started at 5:33 PM
3/13/2010	5:33:15 PM	Helium valve closed
3/13/2010	5:33:15 PM	H2 valve closed
3/13/2010	5:33:15 PM	BCl3 valve closed
3/13/2010	5:33:15 PM	PH3 valve closed
3/13/2010	5:33:15 PM	SiCl4 pre valve closed
3/13/2010	5:33:15 PM	SiCl4 post valve closed
3/13/2010	5:33:15 PM	Main Vac valve closed
3/13/2010	5:33:15 PM	Bubbler valve closed
3/13/2010	5:33:15 PM	Bypass valve opened
3/13/2010	5:33:15 PM	Helium MFC set to  0.000000
3/13/2010	5:33:15 PM	H2 MFC set to  0.000000
3/13/2010	5:33:15 PM	BCl3 MFC set to  0.000000
3/13/2010	5:33:15 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:33:15 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:33:15 PM	Tube furnace set to 0
3/13/2010	5:33:44 PM	Helium valve closed
3/13/2010	5:33:44 PM	H2 valve closed
3/13/2010	5:33:44 PM	BCl3 valve closed
3/13/2010	5:33:44 PM	PH3 valve closed
3/13/2010	5:33:44 PM	SiCl4 pre valve closed
3/13/2010	5:33:44 PM	SiCl4 post valve closed
3/13/2010	5:33:44 PM	Bubbler valve closed
3/13/2010	5:33:44 PM	Main Vac valve opened
3/13/2010	5:33:44 PM	Bypass valve opened
3/13/2010	5:33:44 PM	Helium MFC set to  0.000000
3/13/2010	5:33:44 PM	H2 MFC set to  0.000000
3/13/2010	5:33:44 PM	BCl3 MFC set to  0.000000
3/13/2010	5:33:44 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:33:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:33:44 PM	Tube furnace set to 0
3/13/2010	5:33:44 PM	Run finished at 5:33 PM
3/13/2010	5:33:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	5:35:48 PM	Helium MFC set to  100.000000
3/13/2010	5:35:49 PM	Helium valve opened
3/13/2010	5:40:14 PM	Helium MFC set to  0.000000
3/13/2010	5:40:14 PM	Helium valve closed
3/13/2010	5:42:10 PM	Helium MFC set to  2.000000
3/13/2010	5:42:11 PM	Helium valve opened
3/13/2010	5:42:38 PM	Helium MFC set to  5.000000
3/13/2010	5:42:46 PM	Helium MFC set to  10.000000
3/13/2010	5:42:54 PM	Helium MFC set to  0.000000
3/13/2010	5:42:56 PM	Helium valve closed
3/13/2010	5:43:44 PM	Main Vac valve closed
3/13/2010	5:43:53 PM	Helium MFC set to  10.000000
3/13/2010	5:43:53 PM	Helium valve opened
3/13/2010	5:44:22 PM	Bypass solenoid MFC set to  100.000000
3/13/2010	5:44:37 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:44:54 PM	Bypass solenoid MFC set to  5.000000
3/13/2010	5:45:07 PM	Bypass solenoid MFC set to  60.000000
3/13/2010	5:45:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:45:31 PM	Helium MFC set to  0.000000
3/13/2010	5:45:31 PM	Helium valve closed
3/13/2010	5:45:34 PM	Main Vac valve opened
3/13/2010	5:46:58 PM	Main Vac valve closed
3/13/2010	5:47:00 PM	Bypass valve closed
3/13/2010	5:47:12 PM	Bypass valve opened
3/13/2010	5:47:12 PM	Main Vac valve opened
3/13/2010	5:48:06 PM	Recipe started at 5:48 PM
3/13/2010	5:48:06 PM	Helium valve closed
3/13/2010	5:48:06 PM	BCl3 valve closed
3/13/2010	5:48:06 PM	PH3 valve closed
3/13/2010	5:48:06 PM	SiCl4 pre valve closed
3/13/2010	5:48:06 PM	SiCl4 post valve closed
3/13/2010	5:48:06 PM	Main Vac valve closed
3/13/2010	5:48:06 PM	Bypass valve closed
3/13/2010	5:48:06 PM	Bubbler valve closed
3/13/2010	5:48:06 PM	H2 valve opened
3/13/2010	5:48:06 PM	Helium MFC set to  0.000000
3/13/2010	5:48:06 PM	H2 MFC set to  500.000000
3/13/2010	5:48:06 PM	BCl3 MFC set to  0.000000
3/13/2010	5:48:06 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:48:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:48:06 PM	Tube furnace set to 0
3/13/2010	5:49:28 PM	Helium valve closed
3/13/2010	5:49:28 PM	BCl3 valve closed
3/13/2010	5:49:28 PM	PH3 valve closed
3/13/2010	5:49:28 PM	SiCl4 pre valve closed
3/13/2010	5:49:28 PM	SiCl4 post valve closed
3/13/2010	5:49:28 PM	Main Vac valve closed
3/13/2010	5:49:28 PM	Bypass valve closed
3/13/2010	5:49:28 PM	H2 valve opened
3/13/2010	5:49:28 PM	Bubbler valve opened
3/13/2010	5:49:28 PM	Helium MFC set to  0.000000
3/13/2010	5:49:28 PM	H2 MFC set to  500.000000
3/13/2010	5:49:28 PM	BCl3 MFC set to  0.000000
3/13/2010	5:49:28 PM	SiCl4 MFC set to  0.000000
3/13/2010	5:49:28 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	5:49:28 PM	Tube furnace set to 0
3/13/2010	6:12:28 PM	Helium valve closed
3/13/2010	6:12:28 PM	PH3 valve closed
3/13/2010	6:12:28 PM	Main Vac valve closed
3/13/2010	6:12:28 PM	Bypass valve closed
3/13/2010	6:12:28 PM	H2 valve opened
3/13/2010	6:12:28 PM	BCl3 valve opened
3/13/2010	6:12:28 PM	SiCl4 pre valve opened
3/13/2010	6:12:28 PM	SiCl4 post valve opened
3/13/2010	6:12:28 PM	Bubbler valve opened
3/13/2010	6:12:28 PM	Helium MFC set to  0.000000
3/13/2010	6:12:28 PM	H2 MFC set to  475.000000
3/13/2010	6:12:28 PM	BCl3 MFC set to  25.000000
3/13/2010	6:12:28 PM	SiCl4 MFC set to  325.000000
3/13/2010	6:12:28 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	6:12:28 PM	Tube furnace set to 0
3/13/2010	6:32:28 PM	Helium valve closed
3/13/2010	6:32:28 PM	BCl3 valve closed
3/13/2010	6:32:28 PM	PH3 valve closed
3/13/2010	6:32:28 PM	SiCl4 pre valve closed
3/13/2010	6:32:28 PM	SiCl4 post valve closed
3/13/2010	6:32:28 PM	Main Vac valve closed
3/13/2010	6:32:28 PM	Bypass valve closed
3/13/2010	6:32:28 PM	H2 valve opened
3/13/2010	6:32:28 PM	Bubbler valve opened
3/13/2010	6:32:28 PM	Helium MFC set to  0.000000
3/13/2010	6:32:28 PM	H2 MFC set to  400.000000
3/13/2010	6:32:28 PM	BCl3 MFC set to  0.000000
3/13/2010	6:32:28 PM	SiCl4 MFC set to  0.000000
3/13/2010	6:32:28 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	6:32:28 PM	Tube furnace set to 0
3/13/2010	6:52:29 PM	H2 valve closed
3/13/2010	6:52:29 PM	BCl3 valve closed
3/13/2010	6:52:29 PM	PH3 valve closed
3/13/2010	6:52:29 PM	SiCl4 pre valve closed
3/13/2010	6:52:29 PM	SiCl4 post valve closed
3/13/2010	6:52:29 PM	Main Vac valve closed
3/13/2010	6:52:29 PM	Bypass valve closed
3/13/2010	6:52:29 PM	Helium valve opened
3/13/2010	6:52:29 PM	Bubbler valve opened
3/13/2010	6:52:29 PM	Helium MFC set to  400.000000
3/13/2010	6:52:29 PM	H2 MFC set to  0.000000
3/13/2010	6:52:29 PM	BCl3 MFC set to  0.000000
3/13/2010	6:52:29 PM	SiCl4 MFC set to  0.000000
3/13/2010	6:52:29 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	6:52:29 PM	Tube furnace set to 0
3/13/2010	7:00:04 PM	Helium valve closed
3/13/2010	7:00:04 PM	H2 valve closed
3/13/2010	7:00:04 PM	BCl3 valve closed
3/13/2010	7:00:04 PM	PH3 valve closed
3/13/2010	7:00:04 PM	SiCl4 pre valve closed
3/13/2010	7:00:04 PM	SiCl4 post valve closed
3/13/2010	7:00:04 PM	Main Vac valve closed
3/13/2010	7:00:04 PM	Bypass valve closed
3/13/2010	7:00:04 PM	Bubbler valve closed
3/13/2010	7:00:04 PM	Helium MFC set to  0.000000
3/13/2010	7:00:04 PM	H2 MFC set to  0.000000
3/13/2010	7:00:04 PM	BCl3 MFC set to  0.000000
3/13/2010	7:00:04 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:00:04 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:00:04 PM	Tube furnace set to 0
3/13/2010	7:00:04 PM	Run finished at 7:00 PM
3/13/2010	7:03:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	7:03:18 PM	Recipe started at 7:03 PM
3/13/2010	7:03:18 PM	Helium valve closed
3/13/2010	7:03:18 PM	H2 valve closed
3/13/2010	7:03:18 PM	BCl3 valve closed
3/13/2010	7:03:18 PM	PH3 valve closed
3/13/2010	7:03:18 PM	SiCl4 pre valve closed
3/13/2010	7:03:18 PM	SiCl4 post valve closed
3/13/2010	7:03:18 PM	Main Vac valve closed
3/13/2010	7:03:18 PM	Bubbler valve closed
3/13/2010	7:03:18 PM	Bypass valve opened
3/13/2010	7:03:18 PM	Helium MFC set to  0.000000
3/13/2010	7:03:18 PM	H2 MFC set to  0.000000
3/13/2010	7:03:18 PM	BCl3 MFC set to  0.000000
3/13/2010	7:03:18 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:03:18 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:03:18 PM	Tube furnace set to 0
3/13/2010	7:03:46 PM	Helium valve closed
3/13/2010	7:03:46 PM	H2 valve closed
3/13/2010	7:03:46 PM	BCl3 valve closed
3/13/2010	7:03:46 PM	PH3 valve closed
3/13/2010	7:03:46 PM	SiCl4 pre valve closed
3/13/2010	7:03:46 PM	SiCl4 post valve closed
3/13/2010	7:03:46 PM	Bubbler valve closed
3/13/2010	7:03:46 PM	Main Vac valve opened
3/13/2010	7:03:46 PM	Bypass valve opened
3/13/2010	7:03:46 PM	Helium MFC set to  0.000000
3/13/2010	7:03:46 PM	H2 MFC set to  0.000000
3/13/2010	7:03:46 PM	BCl3 MFC set to  0.000000
3/13/2010	7:03:46 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:03:46 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:03:46 PM	Tube furnace set to 0
3/13/2010	7:03:47 PM	Run finished at 7:03 PM
3/13/2010	7:03:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	7:08:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	7:08:08 PM	Recipe started at 7:08 PM
3/13/2010	7:08:08 PM	H2 valve closed
3/13/2010	7:08:08 PM	BCl3 valve closed
3/13/2010	7:08:08 PM	PH3 valve closed
3/13/2010	7:08:08 PM	SiCl4 pre valve closed
3/13/2010	7:08:08 PM	SiCl4 post valve closed
3/13/2010	7:08:08 PM	Main Vac valve closed
3/13/2010	7:08:08 PM	Bypass valve closed
3/13/2010	7:08:08 PM	Bubbler valve closed
3/13/2010	7:08:08 PM	Helium valve opened
3/13/2010	7:08:08 PM	Helium MFC set to  500.000000
3/13/2010	7:08:08 PM	H2 MFC set to  0.000000
3/13/2010	7:08:08 PM	BCl3 MFC set to  0.000000
3/13/2010	7:08:08 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:08:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:08:08 PM	Tube furnace set to 0
3/13/2010	7:09:25 PM	Helium valve closed
3/13/2010	7:09:25 PM	H2 valve closed
3/13/2010	7:09:25 PM	BCl3 valve closed
3/13/2010	7:09:25 PM	PH3 valve closed
3/13/2010	7:09:25 PM	SiCl4 pre valve closed
3/13/2010	7:09:25 PM	SiCl4 post valve closed
3/13/2010	7:09:25 PM	Main Vac valve closed
3/13/2010	7:09:25 PM	Bypass valve closed
3/13/2010	7:09:25 PM	Bubbler valve closed
3/13/2010	7:09:25 PM	Helium MFC set to  0.000000
3/13/2010	7:09:25 PM	H2 MFC set to  0.000000
3/13/2010	7:09:25 PM	BCl3 MFC set to  0.000000
3/13/2010	7:09:25 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:09:25 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:09:25 PM	Tube furnace set to 0
3/13/2010	7:09:25 PM	Run finished at 7:09 PM
3/13/2010	7:09:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2010	7:12:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	7:12:51 PM	Recipe started at 7:12 PM
3/13/2010	7:12:51 PM	Helium valve closed
3/13/2010	7:12:51 PM	H2 valve closed
3/13/2010	7:12:51 PM	BCl3 valve closed
3/13/2010	7:12:51 PM	PH3 valve closed
3/13/2010	7:12:51 PM	SiCl4 pre valve closed
3/13/2010	7:12:51 PM	SiCl4 post valve closed
3/13/2010	7:12:51 PM	Main Vac valve closed
3/13/2010	7:12:51 PM	Bubbler valve closed
3/13/2010	7:12:51 PM	Bypass valve opened
3/13/2010	7:12:51 PM	Helium MFC set to  0.000000
3/13/2010	7:12:51 PM	H2 MFC set to  0.000000
3/13/2010	7:12:51 PM	BCl3 MFC set to  0.000000
3/13/2010	7:12:51 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:12:51 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:12:51 PM	Tube furnace set to 0
3/13/2010	7:13:21 PM	Helium valve closed
3/13/2010	7:13:21 PM	H2 valve closed
3/13/2010	7:13:21 PM	BCl3 valve closed
3/13/2010	7:13:21 PM	PH3 valve closed
3/13/2010	7:13:21 PM	SiCl4 pre valve closed
3/13/2010	7:13:21 PM	SiCl4 post valve closed
3/13/2010	7:13:21 PM	Bubbler valve closed
3/13/2010	7:13:21 PM	Main Vac valve opened
3/13/2010	7:13:21 PM	Bypass valve opened
3/13/2010	7:13:21 PM	Helium MFC set to  0.000000
3/13/2010	7:13:21 PM	H2 MFC set to  0.000000
3/13/2010	7:13:21 PM	BCl3 MFC set to  0.000000
3/13/2010	7:13:21 PM	SiCl4 MFC set to  0.000000
3/13/2010	7:13:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	7:13:21 PM	Tube furnace set to 0
3/13/2010	7:13:21 PM	Run finished at 7:13 PM
3/13/2010	7:13:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	7:13:48 PM	Helium MFC set to  100.000000
3/13/2010	7:13:49 PM	Helium valve opened
3/13/2010	7:17:52 PM	Helium MFC set to  0.000000
3/13/2010	7:17:53 PM	Helium valve closed
3/13/2010	8:29:29 PM	Main Vac valve closed
3/13/2010	8:29:31 PM	Bypass valve closed
3/13/2010	8:29:43 PM	Bypass valve opened
3/13/2010	8:29:44 PM	Main Vac valve opened
3/13/2010	8:30:57 PM	Recipe started at 8:30 PM
3/13/2010	8:30:57 PM	Helium valve closed
3/13/2010	8:30:57 PM	BCl3 valve closed
3/13/2010	8:30:57 PM	PH3 valve closed
3/13/2010	8:30:57 PM	SiCl4 pre valve closed
3/13/2010	8:30:57 PM	SiCl4 post valve closed
3/13/2010	8:30:57 PM	Main Vac valve closed
3/13/2010	8:30:57 PM	Bypass valve closed
3/13/2010	8:30:57 PM	Bubbler valve closed
3/13/2010	8:30:57 PM	H2 valve opened
3/13/2010	8:30:57 PM	Helium MFC set to  0.000000
3/13/2010	8:30:57 PM	H2 MFC set to  500.000000
3/13/2010	8:30:57 PM	BCl3 MFC set to  0.000000
3/13/2010	8:30:57 PM	SiCl4 MFC set to  0.000000
3/13/2010	8:30:57 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	8:30:57 PM	Tube furnace set to 0
3/13/2010	8:32:21 PM	Helium valve closed
3/13/2010	8:32:21 PM	BCl3 valve closed
3/13/2010	8:32:21 PM	PH3 valve closed
3/13/2010	8:32:21 PM	SiCl4 pre valve closed
3/13/2010	8:32:21 PM	SiCl4 post valve closed
3/13/2010	8:32:21 PM	Main Vac valve closed
3/13/2010	8:32:21 PM	Bypass valve closed
3/13/2010	8:32:21 PM	H2 valve opened
3/13/2010	8:32:21 PM	Bubbler valve opened
3/13/2010	8:32:21 PM	Helium MFC set to  0.000000
3/13/2010	8:32:21 PM	H2 MFC set to  500.000000
3/13/2010	8:32:21 PM	BCl3 MFC set to  0.000000
3/13/2010	8:32:21 PM	SiCl4 MFC set to  0.000000
3/13/2010	8:32:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	8:32:21 PM	Tube furnace set to 0
3/13/2010	9:02:21 PM	Helium valve closed
3/13/2010	9:02:22 PM	PH3 valve closed
3/13/2010	9:02:22 PM	Main Vac valve closed
3/13/2010	9:02:22 PM	Bypass valve closed
3/13/2010	9:02:22 PM	H2 valve opened
3/13/2010	9:02:22 PM	BCl3 valve opened
3/13/2010	9:02:22 PM	SiCl4 pre valve opened
3/13/2010	9:02:22 PM	SiCl4 post valve opened
3/13/2010	9:02:22 PM	Bubbler valve opened
3/13/2010	9:02:22 PM	Helium MFC set to  0.000000
3/13/2010	9:02:22 PM	H2 MFC set to  475.000000
3/13/2010	9:02:22 PM	BCl3 MFC set to  25.000000
3/13/2010	9:02:22 PM	SiCl4 MFC set to  325.000000
3/13/2010	9:02:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:02:22 PM	Tube furnace set to 0
3/13/2010	9:22:22 PM	Helium valve closed
3/13/2010	9:22:22 PM	BCl3 valve closed
3/13/2010	9:22:22 PM	PH3 valve closed
3/13/2010	9:22:22 PM	SiCl4 pre valve closed
3/13/2010	9:22:22 PM	SiCl4 post valve closed
3/13/2010	9:22:22 PM	Main Vac valve closed
3/13/2010	9:22:22 PM	Bypass valve closed
3/13/2010	9:22:22 PM	H2 valve opened
3/13/2010	9:22:22 PM	Bubbler valve opened
3/13/2010	9:22:22 PM	Helium MFC set to  0.000000
3/13/2010	9:22:22 PM	H2 MFC set to  400.000000
3/13/2010	9:22:22 PM	BCl3 MFC set to  0.000000
3/13/2010	9:22:22 PM	SiCl4 MFC set to  0.000000
3/13/2010	9:22:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:22:22 PM	Tube furnace set to 0
3/13/2010	9:42:22 PM	H2 valve closed
3/13/2010	9:42:22 PM	BCl3 valve closed
3/13/2010	9:42:22 PM	PH3 valve closed
3/13/2010	9:42:22 PM	SiCl4 pre valve closed
3/13/2010	9:42:22 PM	SiCl4 post valve closed
3/13/2010	9:42:22 PM	Main Vac valve closed
3/13/2010	9:42:22 PM	Bypass valve closed
3/13/2010	9:42:22 PM	Helium valve opened
3/13/2010	9:42:22 PM	Bubbler valve opened
3/13/2010	9:42:22 PM	Helium MFC set to  400.000000
3/13/2010	9:42:22 PM	H2 MFC set to  0.000000
3/13/2010	9:42:22 PM	BCl3 MFC set to  0.000000
3/13/2010	9:42:22 PM	SiCl4 MFC set to  0.000000
3/13/2010	9:42:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:42:22 PM	Tube furnace set to 0
3/13/2010	9:52:23 PM	Helium valve closed
3/13/2010	9:52:23 PM	H2 valve closed
3/13/2010	9:52:23 PM	BCl3 valve closed
3/13/2010	9:52:23 PM	PH3 valve closed
3/13/2010	9:52:23 PM	SiCl4 pre valve closed
3/13/2010	9:52:23 PM	SiCl4 post valve closed
3/13/2010	9:52:23 PM	Main Vac valve closed
3/13/2010	9:52:23 PM	Bypass valve closed
3/13/2010	9:52:23 PM	Bubbler valve closed
3/13/2010	9:52:23 PM	Helium MFC set to  0.000000
3/13/2010	9:52:23 PM	H2 MFC set to  0.000000
3/13/2010	9:52:23 PM	BCl3 MFC set to  0.000000
3/13/2010	9:52:23 PM	SiCl4 MFC set to  0.000000
3/13/2010	9:52:23 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:52:23 PM	Tube furnace set to 0
3/13/2010	9:52:24 PM	Run finished at 9:52 PM
3/13/2010	9:54:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2010	9:54:29 PM	Recipe started at 9:54 PM
3/13/2010	9:54:29 PM	Helium valve closed
3/13/2010	9:54:29 PM	H2 valve closed
3/13/2010	9:54:29 PM	BCl3 valve closed
3/13/2010	9:54:29 PM	PH3 valve closed
3/13/2010	9:54:29 PM	SiCl4 pre valve closed
3/13/2010	9:54:29 PM	SiCl4 post valve closed
3/13/2010	9:54:29 PM	Main Vac valve closed
3/13/2010	9:54:29 PM	Bubbler valve closed
3/13/2010	9:54:29 PM	Bypass valve opened
3/13/2010	9:54:29 PM	Helium MFC set to  0.000000
3/13/2010	9:54:29 PM	H2 MFC set to  0.000000
3/13/2010	9:54:29 PM	BCl3 MFC set to  0.000000
3/13/2010	9:54:29 PM	SiCl4 MFC set to  0.000000
3/13/2010	9:54:29 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:54:29 PM	Tube furnace set to 0
3/13/2010	9:54:58 PM	Helium valve closed
3/13/2010	9:54:58 PM	H2 valve closed
3/13/2010	9:54:58 PM	BCl3 valve closed
3/13/2010	9:54:58 PM	PH3 valve closed
3/13/2010	9:54:58 PM	SiCl4 pre valve closed
3/13/2010	9:54:58 PM	SiCl4 post valve closed
3/13/2010	9:54:58 PM	Bubbler valve closed
3/13/2010	9:54:58 PM	Main Vac valve opened
3/13/2010	9:54:58 PM	Bypass valve opened
3/13/2010	9:54:58 PM	Helium MFC set to  0.000000
3/13/2010	9:54:58 PM	H2 MFC set to  0.000000
3/13/2010	9:54:58 PM	BCl3 MFC set to  0.000000
3/13/2010	9:54:58 PM	SiCl4 MFC set to  0.000000
3/13/2010	9:54:58 PM	Bypass solenoid MFC set to  0.000000
3/13/2010	9:54:58 PM	Tube furnace set to 0
3/13/2010	9:54:58 PM	Run finished at 9:54 PM
3/13/2010	9:54:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
